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SLS-200
SLS-500


 
 
 
 
 

 
 
Single Plane Air Bearing Stage 适用 (SLS-500)
Gantry type Air Bearing Stage 适用 (SLS-1000)
Auto Focus System 适用
Glass Alignment Tool 适用
Position Based Triggering 适用
精密R轴Stage适用 (SLS-500)
Laser Scale 适用 (SLS-1000)
8x Pulse Duration Extender 适用
Poly-Si 结晶化用
 


 
 
项目
SLS-500
SLS-1000
Stage
Travel length
X
720 mm
X
1160 mm
Y
590 mm
Y
960 mm
Resolution
X
0.1 um
X
0.1 um
Y
0.02 um
Y
0.02 um
Accuracy
Full
± 1 um
Full
± 1 um
100mm
± 0.2 um
100mm
± 0.2 um
Max. Velocity
X
500 mm/s
X
600 mm/s
Y
100 mm/s
Y
100 mm/s
Settling Time
0.35 sec
0.35 sec
Chuck Flatness
± 5 um
± 7.5 um
Optics
Beam Field Size
15 mm x 1.2 mm
25 mm x 1.2 mm
Resolution
Lines
2 um
Lines
3 um
Spaces
2 um
Spaces
2 um
Homogeneity
± 2.5 %
± 2.5 %
Depth of Focus
30 um
50 um
Laser Energy Density
1.4J/cm2
1.3J/cm2
Laser
Power
315W (300Hz x 1.05J/p)
Wave Length
308nm (XeCl)
 
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